000 00440pam a2200157 a 4500
999 _c2701
_d2701
020 _a1904798063
020 _a9781904798064
082 0 0 _a620.8620
_bM54
100 1 _aMoorthy, C.K
245 1 0 _aPrinciples and practices of contamination control and cleanrooms
260 _aUK
_bAnshan Limited
_cc2004
300 _axi, 239 p. :
_bill. ;
650 0 _aClean rooms.
650 0 _aDecontamination (from gases, chemicals, etc.)
942 _cBK